oxides

Comparison between a-SiOx:H and a-Si:H as passivation buffer layer for heterojunction solar cells

In crystalline silicon based heterojunction solar cells the surface passivation quality is fundamental to obtain high efficiency. Intrinsic a-Si:H, as obtained by PECVD process from silane dissociation, is a good candidate for surface passivation, but UV absorption of this material limits the current generation. Moreover, surface passivation quality can be compromised when fabrication steps, following the a-Si:H deposition, exceed the a-Si:H deposition temperature.

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