Variable Pressure Scanning Electron Microscopy supported by dual Energy Dispersive X-ray Spectroscopy (VP-SEM-dEDS)
Variable pressure scanning electron microscopy (VP-SEM, Hitachi SU-3500) is supported by dual energy dispersive X-ray spectroscopy detectors (dEDS) arranged in parallel configuration (Bruker, XFlash® 6|60) able to high sensitivity elemental analysis by their large active area of a 60 mm2 each.VP-SEM-dEDS is able to observe in situ