Integrated germanium-on-silicon waveguides for mid-infrared photonic sensing chips
04 Pubblicazione in atti di convegno
Gallacher Kevin, Sorgi Alessia, Giliberti Valeria, Frigerio Jacopo, Isella Giovanni, Biagioni Paolo, Paul Douglas J., Ortolani Michele, Baldassarre Leonetta
ISSN: 2162-2027
Germanium-on-silicon waveguides are designed, fabricated and characterized with a novel near-field infrared spectroscopy technique that allows on-chip investigation of the in-coupling efficiency. On-chip propagation along bends and straight sections up to 0.8 mm is demonstrated around ? = 6 ?m.