An approach to the extreme Miniaturization of Rotary Comb Drives
The evolution of microelectronic technologies is giving constant impulse to advanced
micro-scaled systems which perform complex operations. In fact, the actual micro and
nano Electro-Mechanical Systems (MEMS/NEMS) easily integrate information-gathering and
decision-making electronics together with all sorts of sensors and actuators. Mechanical manipulation
can be obtained through microactuators, taking advantage of magnetostrictive, thermal, piezoelectric
or electrostatic forces. Electrostatic actuation, more precisely the comb-drive approach, is often