An approach to the extreme Miniaturization of Rotary Comb Drives
The evolution of microelectronic technologies is giving constant impulse to advanced
micro-scaled systems which perform complex operations. In fact, the actual micro and
nano Electro-Mechanical Systems (MEMS/NEMS) easily integrate information-gathering and
decision-making electronics together with all sorts of sensors and actuators. Mechanical manipulation
can be obtained through microactuators, taking advantage of magnetostrictive, thermal, piezoelectric
or electrostatic forces. Electrostatic actuation, more precisely the comb-drive approach, is often
employed due to its high versatility and low power consumption. Moreover, the device design and
fabrication process flow can be simplified by compliant mechanisms, avoiding complex elements
and unorthodox materials. A nano-scaled rotary comb drive is herein introduced and obtained using
NEMS technology, with an innovative design which takes advantages of the compliant mechanism
characteristics. A theoretical and numerical study is also introduced to inspect the electro-mechanical
behavior of the device and to describe a new technological procedure for its fabrication.