Variable pressure scanning electron microscopy (VP-SEM, Hitachi SU-3500) is supported by dual energy dispersive X-ray spectroscopy detectors (dEDS) arranged in parallel configuration (Bruker, XFlash® 6|60) able to high sensitivity elemental analysis by their large active area of a 60 mm2 each.VP-SEM-dEDS is able to observe in situ non-conductive samples in their native state or better in hydrate state without using the traditional conductive coating. The dEDS offers particular advantages: (i) reduction acquisition times of X-ray spectra suitable for samples extremely sensitive to electronic radiation damage; (ii) high acquisition statistics useful for quantitative analysis of the chemical species and for high quality of the chemical imaging mapping; (iii) absence of the Shadow effect, essential for analysing samples with a highly roughness surface.
The merging of low vacuum observation with microanalysis provides both novel fundamental discoveries and new applications, giving the opportunity to observe and analyse the chemical spatial distribution of hydrated in their native state at microscopic scale. By combining these scientific techniques, VP-SEM-dEDS is capable of providing a useful morpho-chemical characterization of any sample at microscopic, as a multidisciplinary field spanning life sciences, medicine, material science, industrial engineering, cultural heritage, etc.