Ricerc@Sapienza

This paper presents the integration on the same glass substrate of an amorphous silicon photodiode and a diffused waveguide, to achieve an integrated evanescent waveguide sensor. Simulations performed with COMSOL Multiphysics show that the coupling efficiency between the waveguide and the photosensor is strongly affected by the presence of the passivation layer, and by thickness and refractive index of the transparent electrode of the photodiode. A first prototype has been fabricated using standard microelectronics techniques in a 6-masks process flow.

We present the design of an integrated optoelectronic device based on an evanescent waveguide sensor with a-Si:H photodiodes and ion-exchange diffused glass waveguides for on-chip biomolecular detection.

Here we present the design of an amorphous silicon photodetector integrated with an ion-exchanged waveguide on the same glass substrate in order to obtain an evanescent waveguide sensor for on-chip biomolecular recognition in Lab-on-Chip applications. We studied the behaviour of a monochromatic light in a channel waveguide and its coupling into the thin-film sensor, using COMSOL Multiphysics. Simulations show that the presence of the photodiode’s insulation layer and transparent electrode strongly affects the coupling efficiency between the waveguide and the sensor.