Design of an Evanescent Waveguide Sensor Based on a-Si:H Photodiodes for Lab-on-Chip Applications

04 Pubblicazione in atti di convegno
Buzzin Alessio, Asquini Rita, Caputo Domenico, de Cesare Giampiero
ISSN: 1876-1100

Here we present the design of an amorphous silicon photodetector integrated with an ion-exchanged waveguide on the same glass substrate in order to obtain an evanescent waveguide sensor for on-chip biomolecular recognition in Lab-on-Chip applications. We studied the behaviour of a monochromatic light in a channel waveguide and its coupling into the thin-film sensor, using COMSOL Multiphysics. Simulations show that the presence of the photodiode’s insulation layer and transparent electrode strongly affects the coupling efficiency between the waveguide and the sensor.

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