Evanescent Waveguide Sensor for On-Chip Biomolecular Detection
This work presents analysis and development of an evanescent waveguide sensor system,
which integrates an amorphous silicon photodiode and a glass-diffused waveguide. Design of the
system includes a study of thickness and refractive index of the transparent electrode of the diode,
which are crucial parameters for the optimization of the optical coupling between the waveguide
and the photodetector. Preliminary electro-optical measurements on the fabricated device show