SU-8

On-glass integrated su-8 waveguide and amorphous silicon photosensor for on-chip detection of biomolecules: Feasibility study on hemoglobin sensing

An optoelectronic, integrated system-on-glass for on-chip detection of biomolecules is here presented. The system’s working principle is based on the interaction, detected by a hydrogenated amorphous silicon photosensor, between a monochromatic light travelling in a SU-8 polymer optical waveguide and the biological solution under analysis. Optical simulations of the waveguide coupling to the thin-film photodiode with a specific design were carried out.

Design of an Evanescent Waveguide Sensor Based on a-Si:H Photodiodes for Lab-on-Chip Applications

Here we present the design of an amorphous silicon photodetector integrated with an ion-exchanged waveguide on the same glass substrate in order to obtain an evanescent waveguide sensor for on-chip biomolecular recognition in Lab-on-Chip applications. We studied the behaviour of a monochromatic light in a channel waveguide and its coupling into the thin-film sensor, using COMSOL Multiphysics. Simulations show that the presence of the photodiode’s insulation layer and transparent electrode strongly affects the coupling efficiency between the waveguide and the sensor.

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