Integrated sensor based on a-Si:H photodiodes and diffused glass waveguides for biomedical applications
04 Pubblicazione in atti di convegno
DE CESARE Giampiero, Asquini Rita, Buzzin Alessio, D'Alessandro Antonio, Nascetti Augusto, Caputo Domenico
We present the design and fabrication of an evanescent waveguide sensor based on a-Si:H photodiodes for biomedical applications. The complete device presents a noise level lower than 2fA and a responsivity of 300mA/W at 532nm.